Micromachine [more info]

Processed by RIE-800iPB

μTAS [more info]

Processed by RIE-10NR
[Photo by RIKEN]

Micromachine [more info]

Processed by RIE-800iPB

GMR Head [more info]

Processed by ICP etching system

Micromachine [more info]

Processed by RIE-800iPB

Ferroelectric Nanotube [more info]

Micromachine [more info]

Processed by RIE-800iPB

Micromachine [more info]

Processed by VPE-4F

Micromachine [more info]

Processed by RIE-400iPB

Micromachine [more info]

Processed by VPE-4F
[Photo by Robot/Microsystem Lab, Kansai Univ]

Micromachine [more info]

Processed by RIE-400iPB

Micromachine [more info]

Processed by VPE-4F
[Photo by Dr. Itou, Fukushima Techonology Center]

Micromachine [more info]

Processed by RIE-400iPB

Power Device [more info]